- The internal structure inspection function will be improved greatly by the small nano-focus X-ray CT equipment in place of the conventional electron microscopy.
- Because the cutting, machining, polishing, and vapor deposition processes are not necessary, the environmental load and the burden of the operator will be reduced greatly.
- By nano-focus X-ray tomography (CT), not only the surface but also the inside nano level 3D structure can be observed and analyzed.
Effect(s)
Equipment cost: Reduction of about 50% compared to conventional method
Spatial resolution: 0.2 μm by maximum magnification
Equipment installation area: 1/4 compared to conventional method
National Institute of Advanced Industrial Science and Technology (Role: Reconfiguration of 3D image from stereo X-ray image)
Kyoto Institute of Technology (Role: Research, development, and evaluation on 3D X-ray CT software)
Iwate Prefectural University (Role: Measurement of 3D CT image, and research on information processing technology)
Example of Application
- Inspection of resin parts of automobiles
- Inspection of small parts of various electronic equipment
Technical Problems
- Because the nano-focus X-ray generator is expensive, the system will be expensive. If the cost is improved, the adoption to plants will be expanded.
- Because the X-ray output of the nano-focus X-ray generator is weak, the photography takes time. The sensitivity of the X-ray CCD should be improved to shorten the photographing time.
- The validation service at our company will be promoted continuously until the nano-focus X-ray generator is improved.
Collaborator needed to Improve
- 3D-CAD related companies with knowledge of 3DCT image processing technology
- Research institutes such as universities, etc. with 3DCT evaluation technology and equipment
National Institute of Advanced Industrial Science and Technology (Role: Reconfiguration of 3D image from stereo X-ray image)
Kyoto Institute of Technology (Role: Research, development, and evaluation on 3D X-ray CT software)
Iwate Prefectural University (Role: Measurement of 3D CT image, and research on information processing technology)
Example of Application
- Inspection of resin parts of automobiles
- Inspection of small parts of various electronic equipment
Technical Problems
- Because the nano-focus X-ray generator is expensive, the system will be expensive. If the cost is improved, the adoption to plants will be expanded.
- Because the X-ray output of the nano-focus X-ray generator is weak, the photography takes time. The sensitivity of the X-ray CCD should be improved to shorten the photographing time.
- The validation service at our company will be promoted continuously until the nano-focus X-ray generator is improved.
Collaborator needed to Improve
- 3D-CAD related companies with knowledge of 3DCT image processing technology
- Research institutes such as universities, etc. with 3DCT evaluation technology and equipment